Non-equilibriummodeling of Inductively Coupled Rf Plasmas

This paper discusses the modeling of non-equilibrium effects in inductively coupled plasma facilities. The model relies on the solution of the Navier-Stokes and Maxwell equations in a one-dimensional geometry. Steady-state solutions are obtained by means of an implicit Finite Volume method. Non-equilibrium effects are treated by means of a hybrid State-to-State formulation. The electronic states of atoms are treated as separate species, allowing for non-Boltzmann distributions of their populations. Thermal non-equilibrium between the translation and vibrational of heavy-particles is accounted for by means of a multi-temperature approach. The results show that non-equilibrium plays an important role close to the walls, due to the combined effects of Ohming heating, and chemical composition and temperature gradients.